English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Metallic alloy seal bonding
Details
Full
Export
Statistics
Options
2010
Book Article
Titel
Metallic alloy seal bonding
Author(s)
Reinert, W.
Merz, P.
Hauptwerk
Handbook of silicon based MEMS materials and technologies
DOI
10.1016/B978-0-8155-1594-4.00034-6
Language
English
google-scholar
View Details
Fraunhofer-Institut für Siliziumtechnologie ISIT