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Nanostructured optical filters in CMOS for multispectral, polarization and image sensors

: Weber, Norbert; Ernst, Jürgen; Junger, Stephan; Neubauer, Harald; Tschekalinskij, Wladimir; Verwaal, Nanko


Heuberger, A.; Elst, G.; Hanke, R. ; Fraunhofer-Institut für Integrierte Schaltungen -IIS-, Erlangen:
Microelectronic systems. Circuits, systems and applications
Berlin: Springer, 2011 (Informatik)
ISBN: 978-3-642-23070-7
ISBN: 3-642-23070-9
ISBN: 978-3-642-23071-4 (Online)
ISSN: 0863-503X
Aufsatz in Buch
Fraunhofer IIS ()

Sub-wavelength gratings and hole arrays in metal films are applicable for polarization and spectral selective sensors, respectively. We demonstrate the fabrica-tion of wire grid polarizers using standard complementary metal-oxide semiconductor (CMOS) processes. Extraordinary optical transmission of hole arrays was achieved by using the dedicated layer of a modified CMOS process. The structures were simulated using the finite-difference time-domain (FDTD) method and fabricated using the work flow of integrated circuits. A high-speed polarization image sensor with a pixel size of 6 µm was designed and demonstrated, and multispectral sensing was implemented using nanostructures with different spectral filter performances on a single chip.