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Sensors based on ceramic multilayer technology

: Ziesche, S.; Partsch, U.

Ceramic forum international : CFI. Berichte der Deutschen Keramischen Gesellschaft 89 (2012), Nr.4, S.E43-E45
ISSN: 0173-9913
Fraunhofer IKTS ()
ceramic multilayer technology; HTCC; LTCC; pressure sensors; temperature sensor

With multilayer technology it is possible to manufacture miniaturized ceramic sensors based on ceramic substrates. The sensor body can be geometrically structured in three dimensions, can have integrated electrical wiring and is usually equipped with functional materials forming fine sensory structures. There is a wide variety of producible sensors ranging from mechanical sensors to chemical sensors. The following article tells something about the developments conducted at Fraunhofer IKTS. It starts with the materials used in ceramic multilayer technology, shows something about the processes used for the build-up of a sensor assembly and finally shows some more details of selected sensor types.