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2012
Journal Article
Titel
Mechanical and structural properties of fluorine-ion-implanted boron suboxide
Abstract
Results on a systematic study on the effects of ion implantation on the near-surface mechanical and structural properties of boron suboxide (B 6O) prepared by uniaxial hot pressing are reviewed. 150keV fluorine ions at fluences of up to 5.0 × 10 16ions/cm 2 were implanted into the ultrahard ceramic material at room temperature and characterized using Raman spectroscopy, atomic force microscopy, and scanning electron microscopy with energy-dispersive X-ray spectroscopy. Evidence of ion-beam-assisted nucleation of novel clustered B xO yF z particles by ion implantation is revealed. In addition, obtained results also reveal that fluorine implantation into the B 6O specimen leads to an overall degradation of near-surface mechanical properties with increasing fluorine fluence. Implications of t hese observations in the creation of amorphous near-surface layers by high-dose ion implantation are discussed in this paper.