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Mikromechanisches Element

Micromechanical Element
 
: Conrad, H.; Jung, D.

:
Frontpage ()

DE 102010002811 A: 20100422
Deutsch
Patent, Elektronische Publikation
Fraunhofer IPMS ()

Abstract
A micromechanical element includes a plate-shaped micromechanical functional element, an inner frame and an outer frame. Thereby, a curvature of a main face of the plate-shaped micromechanical functional element is variable. The inner frame encloses the plate-shaped micromechanical functional element along an edge of the main face and is connected to the plate-shaped micromechanical functional element via a plurality of connecting pieces. The outer frame is connected to the inner frame via at least two holding elements. The inner frame is connected to the plate-shaped micromechanical functional element and the outer frame, such that a first angle between the main face of the plate-shaped micromechanical functional element and a main face of the inner frame is smaller than a second angle between a main face of the outer frame and the main face of the inner frame, when the main face of the plate-shaped micromechanical functional element is in a bent state.

: http://publica.fraunhofer.de/dokumente/N-201930.html