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Process simulation for advanced large area optical coatings

 
: Pflug, A.; Szyszka, B.; Sittinger, V.; Niemann, J.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 46th Annual Technical Conference 2003. Proceedings : May 3-8, 2003, San Francisco Marriott, San Francisco, CA
Albuquerque: SVC, 2003
ISBN: 1-591-24635-0
S.241-247
Society of Vacuum Coaters (Annual Technical Conference) <46, 2003, San Francisco/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer IST ()
reactive deposition; sputter deposition; sputtering target; process simulation

: http://publica.fraunhofer.de/dokumente/N-20177.html