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Process simulation for advanced large area optical coatings
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2003
Conference Paper
Titel
Process simulation for advanced large area optical coatings
Author(s)
Pflug, A.
Szyszka, B.
Sittinger, V.
Niemann, J.
Hauptwerk
Society of Vacuum Coaters. 46th Annual Technical Conference 2003. Proceedings
Konferenz
Society of Vacuum Coaters (Annual Technical Conference) 2003
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST
Tags
reactive deposition
sputter deposition
sputtering target
process simulation