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Auslenkbares mikromechanisches System sowie dessen Verwendung

: Klose, T.; Sander, T.; Conrad, H.

Frontpage ()

WO WO2006DE00243 A: 20060203
WO 2007087767 A1: 20070809
Deutsch, Englisch
Patent, Elektronische Publikation
Fraunhofer IPMS ()

The invention relates to deflectable micromechanical systems in which the deflection of at least one deflectable element can be determined, as well as the use thereof. According to the invention, a deflectable element is retained by means of at least one spring element while at least one unit is provided that detects the deflection. Said unit is configured as a piezoresistive sensor comprising at least two contacts which are disposed at a distance from each other in a zone that is deformed during the deflection. The contacts are connected to a voltage source. A non-homogeneous electric field is formed in a downward direction, perpendicular to contact surfaces, such that the electric resistance between contacts, which changes in accordance with the deflection, can be detected as a measure for the position. The zone that is deformed is made of electrically conducting or semiconducting material.