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High numerical aperture hybrid optics for two-photon polymerization

: Burmeister, Frank; Zeitner, Uwe D.; Nolte, Stefan; Tünnermann, Andreas

Postprint (1.1 MByte; PDF; )

Optics Express 20 (2012), Nr.7, S.7994-8005
ISSN: 1094-4087
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IOF ()

We report on an immersion hybrid optics specially designed for focusing ultrashort laser pulses into a polymer for direct laser writing via two-photon polymerization. The hybrid optics allows for well-corrected focusing over a large working distance range of 577 µm with a numerical aperture (NA) of 1.33 and low internal dispersion. We combine the concepts of an aplanatic solid immersion lens (ASIL) for achieving a high NA with a diffractive optical element (DOE) for correction of aberrations. To demonstrate the improvements for volume structuring of the polymer, we compare the achievable structure sizes of our optics with a commercially available oil-immersion objective (100x, NA=1.4).