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Verfahren zum Beschichten eines Substrats mit aluminiumdotiertem Zinkoxid

 
: Sittinger, V.; Szyszka, B.; Dewald, W.; Säuberlich, F.; Stanowski, B.

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Frontpage ()

DE 102009060547 A
Deutsch
Patent, Elektronische Publikation
Fraunhofer IST ()

Abstract
The invention relates to a method for coating a substrate with aluminum-doped zinc oxide, comprising the steps of generating a nucleation coating between 5 nm and 400 nm thick, comprising zinc oxide or doped, in particular aluminum-doped zinc oxide, on the surface of the substrate by atomizing a solid target; generating a quasi-epitaxially propagating top coating comprising aluminum-doped zinc oxide on the nucleation coating; and wet chemically etching the top coating.

: http://publica.fraunhofer.de/dokumente/N-199505.html