Options
Title
Verfahren zum Beschichten eines Substrats mit aluminiumdotiertem Zinkoxid
Date Issued
2009
Author(s)
Sittinger, V.
Szyszka, B.
Dewald, W.
Säuberlich, F.
Stanowski, B.
Patent No
102009060547
Abstract
The invention relates to a method for coating a substrate with aluminum-doped zinc oxide, comprising the steps of generating a nucleation coating between 5 nm and 400 nm thick, comprising zinc oxide or doped, in particular aluminum-doped zinc oxide, on the surface of the substrate by atomizing a solid target; generating a quasi-epitaxially propagating top coating comprising aluminum-doped zinc oxide on the nucleation coating; and wet chemically etching the top coating.
Language
de
Patenprio
DE 102009060547 A