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Spectrophotometry in the vacuum-UV

: Heber, J.; Gatto, A.; Kaiser, N.


Exarhos, G.J. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.; Lawrence Livermore National Laboratory; Wissenschaftliche Gesellschaft Lasertechnik -WLT-:
Laser-induced damage in optical materials 2002. Proceedings : 34th Boulder Damage Symposium, 16 - 18 September 2002, Boulder, Colorado, 7th International Workshop on Laser Beam and Optics Characterization, 18 - 19 September 2002, Boulder, Colorado
Bellingham/Wash.: SPIE, 2003 (SPIE Proceedings Series 4932)
ISBN: 0-8194-4727-7
Annual Boulder Damage Symposium <34, 2002, Boulder/Colo.>
Symposium on Optical Materials for High-Power Lasers <34, 2002, Boulder/Colo.>
International Workshop on Laser Beam and Optics Characterization (LBOC) <7, 2002, Boulder/Colo.>
Fraunhofer IOF ()
spectrophotometry; vacuum UV; thin film; UV cleaning

We report on our investigations of spectrophotometric measurements in the vacuum UV. A commercially available VUV setup at Fraunhofer IOF is used to illustrate spectrally and angle-resolved reflection and transmission measurements together with an in-situ sample irradiation by a F2-excimer laser.