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Plasma-activated bonding
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2012
Book Article
Titel
Plasma-activated bonding
Author(s)
Wiemer, Maik
Wünsch, Dirk
Braeuer, J.
Geßner, Thomas
Hauptwerk
Handbook of wafer bonding
DOI
10.1002/9783527644223.ch6
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS