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Tunable micromachined Fabry-Pérot Filters for infrared spectroscopy: Current state and prospects

 
: Ebermann, M.; Neumann, N.; Meinig, M.; Kurth, S.; Hiller, K.; Gittler, E.

Gessner, T. ; European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components; Fraunhofer Research Institution for Electronic Nano Systems ENAS:
Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM : Dresden, Germany, 22 - 23 March 2011
Berlin: VDE-Verlag, 2011
ISBN: 978-3-8007-3324-8
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components <5, 2011, Dresden>
Englisch
Konferenzbeitrag
Fraunhofer ENAS ()

: http://publica.fraunhofer.de/dokumente/N-198852.html