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Model based design of micro actuators for flow control applications
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2011
Conference Paper
Titel
Model based design of micro actuators for flow control applications
Author(s)
Schueller, M.
Schulze, R.
Zeising, V.
Gebauer, C.
Otto, Thomas
Geßner, Thomas
Hauptwerk
Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM
Konferenz
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2011
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS