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Model based design of micro actuators for flow control applications

 
: Schueller, M.; Schulze, R.; Zeising, V.; Gebauer, C.; Otto, T.; Gessner, T.

Gessner, T. ; European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components; Fraunhofer Research Institution for Electronic Nano Systems ENAS:
Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM : Dresden, Germany, 22 - 23 March 2011
Berlin: VDE-Verlag, 2011
ISBN: 978-3-8007-3324-8
Paper 97
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components <5, 2011, Dresden>
Englisch
Konferenzbeitrag
Fraunhofer ENAS ()

: http://publica.fraunhofer.de/dokumente/N-198846.html