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Design of piezoelectric cantilever actuators for silicon based MEMS

 
: Schulze, R.; Schueller, M.; Billep, D.; Pfeifer, G.

Borgmann, H. ; Wirtschaftsförderung Bremen GmbH -WFB-; Hanseatische Veranstaltungs GmbH -HVG-, Geschäftsbereich Messe Bremen, Bremen:
ACTUATOR 2010, 12th International Conference on New Actuators & 6th International Exhibition on Smart Actuators and Drive Systems. Conference Proceedings : 14. - 16. Juni 2010, Bremen, Germany
Bremen: WFB, 2010
ISBN: 978-3-933339-13-3
ISBN: 978-3-933339-12-6
S.378-381
International Conference on New Actuators (ACTUATOR) <12, 2010, Bremen>
International Exhibition on Smart Actuators and Drive Systems <6, 2010, Bremen>
Englisch
Konferenzbeitrag
Fraunhofer ENAS ()

Abstract
The application of piezoelectric cantilever actuators in the field of MEMS is rapidly increasing. Thus there is a need of high precision manufacturing, which leads to a remarkable demand of preliminary computation. With aligned simulation methods it is feasible to provide a fast and efficient design with the advantage of detailed knowledge of the provided micro-electro-mechanical system. Recent progress in the field of wafer bonding enhances the usability of piezoceramic wafers for MEMS. For the development of new applications a design with respect to technological aspects is necessary. In this work we present a strategy to gain efficient models of piezoelectric cantilever actuators, which are used as transducing elements in sensor and especially actuator applications. A useful linkage between Finite-Element (FE)- and Lumped-Element (LE)-modelling the -Combined Simulation- is presented.

: http://publica.fraunhofer.de/dokumente/N-198827.html