English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
A fast liquid flow sensor with thermal isolation by oxide filled tranches
Details
Full
Export
Statistics
Options
1995
Journal Article
Titel
A fast liquid flow sensor with thermal isolation by oxide filled tranches
Author(s)
Kersjes, Ralf A.
Mokwa, Wilfried
Zeitschrift
Sensors and Actuators. A
DOI
10.1016/0924-4247(94)00924-7
Language
English
google-scholar
View Details
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Tags
anemometer
flowing-through
silicium-gate technology
Anemometer
Durchfluß
Silicium-Gate-Technologie