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Microscanner with Vertical out of Plane Combdrive

: Sandner, Thilo; Jung, Denis; Kallweit, David; Grasshoff, T.; Schenk, Harald


International Conference on Optical MEMS and Nanophotonics, OMN 2011 : 8-11 Aug. 2011
New York, NY: IEEE, 2011
ISBN: 978-1-4577-0336-2
International Conference on Optical MEMS and Nanophotonics (OMN) <16, 2011, Istanbul>
European Commission EC
FP7-ICT; 248623; TACO
Fraunhofer IPMS ()

This paper reports a new concept of quasi-static micro scanning mirrors enabling large static deflections and linearized scanning using vertical out-of-plane comb drives. The vertical combs are realized from a planar scanner substrate by a functionalized wafer bonding process The new device concept is highly flexible by design; different kinds of vertical combs (e. g. staggered and angular) can be realized without changing the process flow. First demonstrator devices are presented: a) quasi-static 1D-scanners with 4mm mirror diameter and 8 degrees mechanical tilt angle for beam steering and b) a quasi-static / resonant 2D-scanner enabling 2D raster scanning with SVGA resolution.