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Tolerance systems for micromachined parts

: Westkämper, E.; Schöbel, J.

Hansen, H.N. ; Technical University of Denmark -DTU-, Department of Manufacturing Engineering, Lyngby; International Institution for Production Engineering Research -CIRP-, Paris:
1st International CIRP Seminar on Micro and Nano Technology 2003. Proceedings : Micro Engineering. Design and Industrial Manufacture of Products based on Micro and Nano Technology. Copenhagen, Denmark, November 13-14, 2003
Lyngby, 2003
International CIRP Seminar on Micro and Nano Technology <1, 2003, Kopenhagen>
Fraunhofer IPA ()
Metrologie; Toleranz; Feinstbearbeitung; Zerspanen

Production processess with an accuracy in the range down to the nanometer scale gain growing importance in industry. A crucial requirement for their economical application are capable and controlled processes. These in turn are dependent on suitable measurement devices and strategies. Though measurement devices with the required precision are available, strategies and tolerance systems in the considered dimensions do not exist. In this paper an approach to the development of tolerance systems for features in precision engineering is presented at the example micromilling and atomic force microscopy.