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Inorganic-organic hybrid polymers for information technology. From planar technology to 3D nanostructures

: Houbertz, R.; Fröhlich, L.; Popall, M.; Streppel, U.; Dannberg, P.; Bräuer, A.; Serbin, J.; Chichkov, B.N.


Advanced engineering materials 5 (2003), Nr.8, S.551-555
ISSN: 1438-1656
ISSN: 1615-7508
Fraunhofer IOF ()
polymer; waveguide; two-photon polymerization; femtosecond laser; photonic crystal

Inorganic-organic hybrid polymers which are suitable for optical applications, were synthesized by hydrolysis/polycondensation reactions. The material can be processed by conventional photolithography as well as by two-photon processes using ferntosecond laser pulses. The material will be briefly described and examples for 2- and 3-D lithography will be given, with particular emphasis on optical applications.