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Effects of interface roughness on the spectral properties of thin films and multilayers

 
: Tikhonravov, A.V.; Trubetskov, M.K.; Tikhonravov, A.A.; Duparre, A.

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Applied optics 42 (2003), Nr.25, S.5140-5148
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Englisch
Zeitschriftenaufsatz
Fraunhofer IOF ()
scattering; rough surface; thin film

Abstract
We introduce two parameters, large-scale and small-scale rms roughness, to take into account the interface properties of thin filins and multilayers in the calculation of their specular reflectance and transmittance. A theoretical motivation for the introduction of these two parameters instead of a standard single rms roughness is provided. Experimental power spectral density functions of several samples are used to illustrate ways in which the parameters introduced can be evaluated.

: http://publica.fraunhofer.de/dokumente/N-19600.html