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2011
Journal Article
Titel
Evaluation of economic effects as the basis for assessing virtual metrology investment
Abstract
This paper presents the evaluation of economic effects due to the implementation of virtual metrology (VM) algorithms into the IT infrastructure of IC manufacturers factories, providing the basis for assessing the investment into VM. The basic assumptions for the calculations are explained. Based on the scenario of implementing VM into plasma etchers of a model fab, results of benefit and cost calculation are presented.