Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Outgassing measurements - VDI 2083-17

: Keller, Markus

Präsentation urn:nbn:de:0011-n-1959386 (2.0 MByte PDF)
MD5 Fingerprint: cf6c1ee4402747b3880fdac17c1c177c
Erstellt am: 6.3.2012

Agilent Technologies Deutschland GmbH, Böblingen; Fraunhofer-Institut für Produktionstechnik und Automatisierung -IPA-, Stuttgart; Markes International, Cincinnati/Ohio; ENV Sciences Trading:
Outgassing of clean room suitable materials (CSM) : CSM Workshop Meeting, 6.12.2011, Tokyo, Japan
Tokyo, 2011
31 Folien
Workshop Meeting "Outgassing of Clean Room Suitable Materials" <2011, Tokyo>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IPA ()
VOC Emission; Volatile Organic Compounds (VOC); VDI 2083-17; Ausgasung; Reinraumtechnik

In such fields as semiconductor and space cleanroom technology, materials implemented in specific applications need to be assessed for emissions of volatile organic compounds (VOC) and classified in order to permit direct comparisons to be made. The presentation shows a standardized procedure for testing and classifying materials with uniform sample preparation and defined storage times. It describes preparation of the samples, their storage in a VOC-reduced minienvironment, avoidance of cross-contamination, sampling using appropriate adsorbers in semi-automated micro-chambers and analysis via thermodesorption coupled with chromatography and mass spectrometry (TD-GC/MS). Once the active surface area, sampling time and VOC mass emitted are known, a specific emission rate can be determined which is then converted into a classification number. Knowledge of the emission class enables the VOC charge of a defined area at a specific point in time to be calculated in reality. The standardized procedure is laid down in the new guideline VDI 2083 part 17. The test and classification allow a fast material screening compared to existing large chamber measurements and other cleanroom relevant methods. The resulting material classification numbers are entered into the database and of the Fraunhofer industrial alliance CSM - cleanroom suitable materials to allow the tested products to be directly compared with one another. This enables a material selection already in the planning phase of a cleanroom or other environment. An easy-to-use simulation model enables the user to estimate the expected VOC-level and therefore the ISO-AMC-Classsification according to ISO 14644-8 of the environment to be constructed. A measurement setup is demonstrated for the verification of a cleanroom air cleanliness class according to ISO 14644-8 regarding volatile organic contamination.