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Hybrid optics for three-dimensional microstructuring of polymers via direct laser writing

: Burmeister, Frank; Zeitner, Uwe D.; Nolte, Stefan; Tünnermann, Andreas


Schoenfeld, W.V. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V : 21 - 26 January 2012, San Francisco, California United States
Bellingham, WA: SPIE, 2012 (Proceedings of SPIE 8249)
ISBN: 978-0-8194-8892-3
Paper 824910
Conference "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics" <5, 2012, San Francisco/Calif.>
Fraunhofer IOF ()
two-photon polymerization; refractive/diffractive hybrid optics; ultrashort laser pulse; refractive index mismatch; aberration correction

We present an immersion hybrid optics specially designed for focusing ultrashort laser pulses into a polymer for direct laser writing via two-photon polymerization. The hybrid optics enables well corrected focusing over a working distance range of 577 ?m with a numerical aperture (NA) of 1.33 thereby causing low internal dispersion. We combine the concepts of an aplanatic solid immersion lens (ASIL) for achieving a high NA with the correction of aberrations with a diffractive optical element (DOE). To demonstrate the improvements for volume structuring of the polymer, we compare achievable feature sizes of structures written with our optics and a commercial available oil immersion objective (100x, NA=1.4).