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Fabrication and characterization of a form- and force-locked piezo-metal sensor module

: Neugebauer, Reimund; Schubert, Andreas; Richter, Frank; Koriath, Hans-Joachim; Peter, Siegfried; Berg, Sania; Jahn, Stephan F.; Müller, Benedikt; Müller, Michael

Preprint urn:nbn:de:0011-n-1954693 (471 KByte PDF)
MD5 Fingerprint: 6d574eb73097c64a23c285f87b63f0d2
Erstellt am: 22.2.2012

Neugebauer, Reimund ; Fraunhofer-Institut für Werkzeugmaschinen und Umformtechnik -IWU-, Chemnitz; TU Chemnitz, Institut für Werkzeugmaschinen und Produktionsprozesse:
Integration of active functions into structural components : 3rd Scientific Symposium CRC/Transregio 39 PT-PIESA, Chemnitz, 12.-13. Oktober 2011. High-volume production-compatible production technologies for lightmetal and fiber composite-based components with integrated piezo sensores and actuators
Chemnitz, 2011
ISBN: 978-3-00-035549-3
Wissenschaftliches Symposium des Transregio PT-PIESA <3, 2011, Chemnitz>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IWU ()
Piezo-Metal Module; microforming; piezo; sensor and actuator

The direct integration of piezoceramics in sheet metal is a novel approach for production of adaptronic structural metal parts. In this paper the manufacturing process and characterization results of the first piezo-metal sensor module are described. The processes include high precision generation of micro-cavities in sheet metal, microscopic piezoceramic rods, PECVD insulating layers with high dielectric strength, micro-assembly and non-positive joining by forming. For the characterization of the module measurements of surface roughness, geometric parameters, and electrical properties were performed on the rods, the micro-structured sheet, and the insulation layer. Finally, the sensor function has been proven by a mechanical excitation resulting in a proportional measured sensor signal.