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Virtual equipment. A test bench for virtual metrology algorithms

Presentation held at ERIC Conference 2011, Leixlip, October 12th 2011
: Mattes, Andreas; Lewke, Dirk; Schellenberger, Martin

Präsentation urn:nbn:de:0011-n-1954399 (271 KByte PDF)
MD5 Fingerprint: 151108d2337f457221cf2509fbbe7ecb
Erstellt am: 23.2.2012

2011, 14 Folien
European Research and Innovation Conference (ERIC) <2011, Leixlip/Ireland>
Vortrag, Elektronische Publikation
Fraunhofer IISB ()
virtual equipment; virtual metrology; testing; VE; VM

A "virtual equipment" is presented which serves as a test bench for virtual metrology algorithms (VM). Statistical modifications and predictions based on fab history data are used alongside physical simulation to generate test data sets for various common and uncommon states of the processing equipment. These data sets are used to feed and compare the results of different VM algorithms and analyse their sensitivity and measurement capability.