Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Application oriented complex polymer microoptics

: Bräuer, A.; Dannberg, P.; Zeitner, U.; Mann, G.; Karthe, W.


Microsystem Technologies 9 (2003), Nr.5, S.304-307
ISSN: 0946-7076
Fraunhofer IOF ()
polymer micro-optics; wafer scale; reflow; hybrid microoptical element

Three technologies for precise microoptical elements with more than one optical function and fabricated on wafer-scale are described. The combination of reflow technology and direct laser beam writing results in hybrid microoptical el ements, comprising, e.g. refractive and diffractive elements. Another method, selective uv-replication enables for hybrid integration of microoptical elements and optoelectronic wafers and is demonstrated for microlenses integrated on VCSEL and LED-chips. As the third method, double-sided uv-replicated microoptics used, e.g. for micro-telescopes, is demonstrated.