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Fabrication of magnetic layers for electromagnetic microactuators

: Chen, J.; Ruffert, C.; Gatzen, H.H.; Bandorf, R.; Bräuer, G.


Büttgenbach, S. ; Sonderforschungsbereich Konstruktion und Fertigung Aktiver Mikrosysteme, Braunschweig:
Design and manufacturing of active microsystems
Berlin: Springer, 2011 (Microtechnology and MEMS)
ISBN: 978-3-642-12902-5
ISBN: 978-3-642-12903-2
Aufsatz in Buch
Fraunhofer IST ()

For designing and fabricating magnetic microactuators, both soft and hard magnetic materials may be required. For soft magnetic materials, a high saturation flux density Bs and a great relative permeability µr is desirable; for forming efficient permanent magnets, hard magnetic materials require a high maximal energy product [BH]max. In the area of soft magnetic materials, investigations on NiFe81/19, NiFe45/55, and CoFe were carried out, while an example for a hard magnetic material providing a high energy product is SmCo. Since patterned thin-film magnets feature inferior magnetic properties compared to bulk magnets, a method of determining their magnetic properties was developed.