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Industrial manufacturing of microsystems

: Westkämper, E.

Büttgenbach, S.; Westkämper, E. ; Verband der Elektrotechnik, Elektronik, Informationstechnik -VDE-:
MICRO.tec 2003: Applications - trends - visions. Proceedings : 2nd VDE World Microtechnologies Congress, October 13 - 15, 2003, International Congress Centre, Munich, Germany
Berlin: VDE Verlag, 2003
ISBN: 3-8007-2791-9
World Microtechnologies Congress (MICRO.tec) <2, 2003, München>
Fraunhofer IPA ()
Mikrotechnologie; Mikrosystem; Maschinenbau; Fertigung

Developments in microtechnology and nanotechnology have paved the way for miniaturizing components, parts and form elements in mechanical engineering. It would not be correct just to search for ways of applying these techniques to mechanical engineering. A much more promising concept is to start with existing components and to follow up the ideas of functional integration and the miniaturization of dimensions and precision. This way uses the technological potential of known and new technologies and is orientated towards the demands of intelligent machines and equipment of the future. The manufacturing of such miniaturized components and micro systems requires a high degree of automation to guarantee reliable processes.