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Micropatterned thin films for optimisation of the microtribological behaviour in MEMS and microactuators
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2003
Conference Paper
Titel
Micropatterned thin films for optimisation of the microtribological behaviour in MEMS and microactuators
Author(s)
Bandorf, R.
Lüthje, H.
Henke, C.
Sick, J.-H.
Hauptwerk
MICRO.tec 2003: Applications - trends - visions. Proceedings
Konferenz
World Microtechnologies Congress (MICRO.tec) 2003
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST