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Wafer-level glass-caps for advanced optical applications

: Leib, J.; Gyenge, O.; Hansen, U.; Maus, S.; Hauck, K.; Zoschke, K.; Toepper, M.


IEEE Components, Packaging, and Manufacturing Technology Society:
IEEE 61st Electronic Components and Technology Conference, ECTC 2011 : Lake Buena Vista, Florida, USA, 31 May - 3 June 2011; 2011 proceedings
Piscataway/NJ: IEEE, 2011
ISBN: 978-1-61284-497-8 (Print)
ISBN: 978-1-61284-498-5
ISBN: 978-1-61284-496-1
Electronic Components and Technology Conference (ECTC) <61, 2011, Lake Buena Vista/Fla.>
Fraunhofer IZM ()

A novel process flow to manufacture miniaturized optical windows on wafer-level is presented. Those windows can be used for miniaturized optical products like high-brightness LEDs (HB-LED) and digital projection (DLP) as well as more complex optical data-communication, since integrated optical functions can be implemented with low tolerances. We explain the fabrication of cap-wafers having a shallow cavity with a depth of typically 10m used in photo sensors and a unique manufacturing process for cap-wafers with a deep cavity of e.g. 300m used in LED packaging. Those cap-wafers are used in wafer-level integration of advanced, miniaturized optical products. We discuss two options for wafer bonding i.e. bonding using adhesive as well as anodic bonding. As an example on product level a miniaturized photo sensor package, a pressure sensor package as well as a LED package is discussed.