Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Preface

 
: Sah, R.E.

Sah, R.E. ; Electrochemical Society -ECS-, Dielectric Science and Technology Division:
Silicon nitride, silicon dioxide, and emerging dielectrics 11 : Full length papers of the International Symposium on Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics to be held May 1 - 6, 2011 in Montreal, Canada, as part of the 219th meeting of the Electrochemical Society (ECS)
Pennington, NJ: ECS, 2011 (ECS transactions 35, 4)
ISBN: 978-1-56677-865-7
ISBN: 978-1-60768-215-8
ISSN: 1938-5862
S.iii-iv
Electrochemical Society (Meeting) <219, 2011, Montreal>
Englisch
Konferenzbeitrag, Zeitschriftenaufsatz
Fraunhofer IAF ()

: http://publica.fraunhofer.de/dokumente/N-189535.html