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Development of the micro-mirror with large scaning angle using FE-based metallic glass thin film

 
: Lee, J.-W.; Lin, Y.-C.; Kaushik, N.; Sharma, P.; Inoue, A.; Esashi, M.; Gessner, T.

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Institute of Electrical and Electronics Engineers -IEEE-:
16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011 : 5-9 June 2011, Beijing
New York, NY: IEEE, 2011
ISBN: 978-1-4577-0157-3
ISBN: 978-1-4577-0156-6
S.2912-2915
International Solid-State Sensors, Actuators and Microsystems Conference <16, 2011, Beijing>
Englisch
Konferenzbeitrag
Fraunhofer ENAS ()

Abstract
In order to realize the large tilting angle of micro-mirror devices without mechanical failure, the mirror structure was fabricated using a Fe-based metallic glass (MG) thin film. The micro-mirrors with mirror-plate diameter of 900m and torsion bar dimensions; length 250m, width 30m and thickness 3m were fabricated. Extremely large tilting angle of 270 was obtained on activation of mirror by using a permanent magnet. And when 93mA was applied to the driving set-up using Lorentz force, over 75 of mechanical angle was obtained. Large tilting angle of micro-mirror is due to the torsion bar which was fabricated with Fe-based MG thin film that has large elastic strain limit, excellent magnetic and mechanical properties.

: http://publica.fraunhofer.de/dokumente/N-189390.html