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2011
Conference Paper
Titel
Biocompatible AlN-based piezo energy harvesters for implants
Abstract
In this work, we show that thin biocompatible AlN films reveal a stable, frequency independent piezoresponse demonstrating a good applicability for implantable micro-generators. It was demonstrated that although more power is generated by resonant (tensile stressed) systems, e.g. cantilevers and planar membranes, the non-resonant (compressive stressed) systems, e.g. corrugated membranes, are preferable for this purpose due to the generation of sufficient power at low-frequency aperiodic vibrations and at very low accelerations.
Author(s)