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Micromirror with large-tilting angle using Fe-based metallic glass

: Lee, J.-W.; Lin, Y.-C.; Kaushik, N.; Sharma, P.; Makino, A.; Inoue, A.; Esashi, M.; Gessner, T.


Optics Letters 36 (2011), Nr.17, S.3464-3466
ISSN: 0146-9592
Fraunhofer ENAS ()

For enhancing the micromirror properties like tilting angle and stability during actuation, Fe-based metallic glass (MG) was applied for torsion bar material. A micromirror with mirror-plate diameter of 900 m and torsion bar dimensions length 250 m, width 30 m and thickness 2.5 m was chosen for the tilting angle tests, which were performed by permanent magnets and electromagnet setup. An extremely large tilting angle of over ?270° was obtained from an activation test by permanent magnet that has approximately 0.2 T of magnetic strength. A large mechanical tilting angle of over ?70° was obtained by applying approximately 1.1mT to the mirror when 93mA was applied to solenoid setup. The large-tilting angle of the micromirror is due to the torsion bar, which was fabricated with Fe-based MG thin film that has large elastic strain limit, fracture toughness, and excellent magnetic property.