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Characterization of stacked sol-gel films: Comparison of results derived from scanning electron microscopy, UV-vis spectroscopy and ellipsometric porosimetry

: Bittner, A.; Schmitt, A.; Jahn, R.; Löbmann, P.


Thin solid films 520 (2012), Nr.6, S.1880-1884
ISSN: 0040-6090
Fraunhofer ISC ()

TiO2/MgF2 bi-layers were prepared by sol-gel processing in both stacking sequences. Films were characterized by scanning electron microscopy, UV-vis spectrometry, and ellipsometric porosimetry. The results obtained by the different methods are compared. The validity and limitations of the respective techniques are discussed with special focus on film porosity and the interface between the TiO2 and MgF2 material.