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Calibration of diffractive micromirror arrays for microscopy applications

: Berndt, Dirk; Heber, Jörg; Sinning, Steffen; Rudloff, Dirk; Wolschke, Steffen; Eckert, Mark; Schmidt, Jan-Uwe; Bring, M.; Wagner, Michael; Lakner, Hubert

Postprint urn:nbn:de:0011-n-1890524 (3.1 MByte PDF)
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Copyright Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Erstellt am: 8.6.2016

Wang, Y. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Sensor and micromachined optical device technologies : International Symposium on Photoelectronic Detection and Imaging 2011; 24 - 26 May 2011, Beijing, China
Bellingham, WA: SPIE, 2011 (Proceedings of SPIE 8191)
ISBN: 978-0-8194-8832-9
Paper 81910O
International Symposium on Photoelectronic Detection and Imaging (ISPDI) <4, 2011, Beijing>
European Commission EC
FP7; 215597; MEMI
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IPMS ()

We report on our investigation to precisely actuate diffractive micromirror arrays (MMA) with an accuracy of /100. The test samples consist of analog, torsional MEMS arrays with 65 536 (256x256) mirror elements. These light modulators were developed for structured illumination purposes to be applied as programmable mask for life science and semiconductor microscopy application. Main part of the work relies on the well known characterization of MEMS mirrors with profilometry to automatically measure and approximate the MMA actuation state with high resolution. Examples illustrate the potential of this strategy to control the tilt state of many thousand micromirrors within the accuracy range of the characterization tool. In a dynamic range between 0 and >250 nm the MMA deflection has been precisely adjusted for final MMA application in the deep-UV - VIS - NIR spectral range. The optical properties of calibrated MMAs are tested in a laser measurement setup. After MMA calib ration an increased homogeneity and improved image contrast are demonstrated for various illumination patterns.