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2010
Conference Paper
Titel
Debindering of non oxide ceramics under protective atmosphere
Abstract
Debindering of Non Oxide Ceramics (NOC) like Si3N4, MoSi2 or AlN has been investigated using a kinetic model to understand and optimize binder removal in Ar or N2 atmosphere. The paper focuses on AlN ceramics, especially high volume parts for applications in semiconductor industry, power electronics and space applications. Properties of AlN green parts have been monitored during debindering: wetting behavior of binder, permeability of gaseous species in pore channels, debindering kinetics and mechanical strength. The maximum safe debindering rate was determined allowing debindering without any damage of specimen. A kinetic model was used to calculate optimized heating cycles from the experimental data. Results are shown for an AlN unit dedicated for space application.
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