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Enhancing the potential of block copolymer lithography with polymer self-consistent field theory simulations

 
: Mickiewicz, R.A.; Yang, J.K.W.; Hannon, A.F.; Jung, Y.-S.; Alexander-Katz, A.; Berggren, K.K.; Ross, C.A.

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Macromolecules 43 (2010), Nr.19, S.8290-8295
ISSN: 0024-9297
ISSN: 1520-5835
Englisch
Zeitschriftenaufsatz
Fraunhofer FIRST ()

Abstract
Self-consistent field theory methodology is used to explore the graphoepitaxy of spherical-morphology block copolymers templated by an array of posts, as well as to predict the formation of aperiodic templated structures, giving an excellent agreement with experimental results. Simulations in two and three dimensions were performed on model hexagonal lattices of posts with spacing, Lpost that was varied in the range Lpost = 1.7L0 to 3.9L0, where L0 is the equilibrium period of the block copolymer. The effects of changing the diameter of the posts and the volume fraction of the block copolymer were investigated, and the formation of a structure with designed aperiodicities was successfully modeled.

: http://publica.fraunhofer.de/dokumente/N-188679.html