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Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range
|Institute of Electrical and Electronics Engineers -IEEE-; Institute of Electrical and Electronics Engineers -IEEE-, Sensor Council:|
IEEE Sensors 2010. Vol.4 : The Ninth IEEE Sensors Conference 2010; Waikoloa, Hawaii, USA, 1 - 4 November 2010
Piscataway/NJ: IEEE, 2010
|Conference on Sensors <9, 2010, Waikoloa/Hawaii>|
|Fraunhofer ENAS ()|
In this paper we describe the design, the fabrication and the properties of tunable MEMS Fabry-Pérot (FP) filters for the long-wave infrared range (LWIR). Based on a mid-wave IR (MWIR) device, completely new optical and electromechanical designs have to be used to extend the spectral range to the LWIR. A new set of optical thin films with low and high refractive index materials and an additional third thin film with medium refractive index are introduced as well. A further approach is focused on covering both, the mid-wave and longwave IR range in one device to obtain dual-band FP filters which is reported too. Significant improvements towards reduced acceleration response were achieved using two springsuspended reflectors. ©2010 IEEE.