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A miniature microwave plasma source used for localized surface treatment and processing

 
: Narendra, J.J.; Grotjohn, T.A.; Asmussen, J.

:

Institute of Electrical and Electronics Engineers -IEEE-:
IEEE 36th International Conference on Plasma Science Abstracts, ICOPS 2009 : San Diego, CA, USA, 1 - 5 June 2009
Piscataway: IEEE Service Center, 2009
ISBN: 978-1-4244-2617-1
ISBN: 978-1-4244-2618-8
ISBN: 978-1-4244-2636-2
Art. 5227471
International Conference on Plasma Sciences (ICOPS) <36, 2009, San Diego/Calif.>
Englisch
Abstract
Fraunhofer ILT ()

: http://publica.fraunhofer.de/dokumente/N-188307.html