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Matching of maximum gauge factor and TCR zero crossing of Me-DLC

: Heckmann, U.; Bandorf, R.; Petersen, M.; Gwozdz, V.; Bräuer, G.


Institute of Electrical and Electronics Engineers -IEEE-:
IEEE Sensors 2011. Proceedings. Vol.1 : Limerick, Ireland, 28 - 31 October 2011
Piscataway/NJ: IEEE, 2011
ISBN: 978-1-4244-9288-6
ISBN: 978-1-4244-9290-9
ISBN: 978-1-4244-9289-3
Conference on Sensors <10, 2011, Limerick>
Fraunhofer IST ()

Metal containing diamond-like carbon (Me-DLC) is a promising material for temperature compensated thin film strain gauges with high strain sensitivity. The discussed material offers gauge factors above 10 at zero crossing of the temperature coefficient of resistance. With Ni-DLC the best results so far were obtained. Based on the results from static deposition an industrially suited process under dynamic conditions was investigated. In both cases gauge factors of approximately 10 could be realized. But there is still room for further improvement. Additionally, Fe-DLC seems to be an interesting alternative. First investigations show gauge factors up to approximately 8 with reasonable temperature compensation.