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2011
Conference Paper
Titel
Influence of evaporation rate, substrate temperature and process chamber pressure on the microstructure of CdTe layers
Abstract
The growth of CdTe thin film solar cell devices by close spaced sublimation (CSS) was systematically investigated. CdTe thin films were deposited onto CdS coated FTO (fluorine doped tin oxide) glass substrates with varying substrate temperature (300EL500°C) and pressures of nitrogen (1.8x10-3 mbar, 6.7x10-2 mbar). The microstructure of the films were examined before and after activation treatment with a high-resolution field emission scanning electron microscope (FE-SEM) on ion beam prepared cross sections. It was observed that the grain size and grain morphology are strongly dependent on the substrate temperature. From this investigation it is possible to define two temperature regions in which compact CdTe layers with low porosity can be deposited. In contrast, little influence of the chamber pressure on the grain size could be observed in the range examined.