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AlN-based piezoelectric bimorph microgenerator utilizing low-level non-resonant excitation

: Hampl, S.; Cimalla, V.; Polster, T.; Hoffmann, M.


Schmid, U. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Smart sensors, actuators, and MEMS V : 18-20 April 2011, Prague, Czech Republic
Bellingham, WA: SPIE, 2011 (Proceedings of SPIE 8066)
ISBN: 978-0-8194-8655-4
Paper 80661E
Conference "Smart Sensors, Actuators, and MEMS" <5, 2011, Prague>
Fraunhofer IAF ()
energy harvesting; aluminum nitride; piezoelectric microgenerator; bimorph; human motion; non-resonant

This work aims for utilizing human ocular motion for the self-sufficient power supply of a minimally invasive implantable monitoring system for intraocular pressure (IOP). With a proven piezoelectric functionality (d(33) > 5 pm/V), nanocrystalline thin films of aluminum nitride (AlN) provide a good capability for micromechanical energy harvesting (EH) in medical applications. Many d31-mode microcantilever architectures are poorly suited for human-induced EH: Resonant mass-spring-damper systems are tested under high, narrow-band excitation frequencies. However, human motions, e.g. vibrations of eyeballs are marked by their low frequency, unpredictable, mainly aperiodic and time-varying signature. Different vibration types and directions are 3-dimensionally superimposed. Saccadic eye movements are favorable for inertial microgenerators because of their high dynamic loading w