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Interaction of titanium diboride/boron nitride evaporation boats with aluminium

Wechselwirkung von Titandiborid/Bornitrid-Verdampfungsschiffchen mit Aluminium
: Herrmann, M.; Räthel, J.; Höhn, S.; Eichler, J.; Michaelis, A.


Journal of the European Ceramic Society 31 (2011), Nr.13, S.2401-2406
ISSN: 0955-2219
Fraunhofer IKTS ()
composites; Borides; nitrides; lifetime; diffusion

Hexagonal boron nitride/previous termtitaniumnext term diboride composites are widely used as evaporation boats for aluminium deposition to produce functional and decorative layers on different target materials. The lifetime of such a material is limited mainly by the previous terminteractionnext term of the metal with the ceramic substrate, but the corrosion mechanism has still not yet been thoroughly investigated and understood. In this article the corrosion mechanism for the evaporation boats used was investigated using thermodynamic calculations, FESEM, EDX and XRD phase analysis. The analysis showed that hexagonal boron nitride (hBN), which is thermodynamically less stable than TiB2, is passivated during the application process through the formation of AlN surface layers, whereas the thermodynamically more stable TiB2 phase dissolves and Ti-rich components precipitate in cooler regions of the evaporation boats.