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Scanning micro spectrometer

 
: Grüger, H.; Wolter, A.; Schuster, T.; Schenk, H.; Lakner, H.K.

Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme -IMS-, Duisburg; Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme -IMS-, Dresden; Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme -IMS-, München:
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme. Annual Report 2002
Duisburg, 2003
ISSN: 1435-0874
S.62-64
Englisch
Aufsatz in Buch
Fraunhofer IMS ()

Abstract
Based on a MOEMS (micro opto mechanical system) scanning mirror chip with an additional grating structure on a top a spectrometer was realized, working in a scanning mode. A single detector is used, cheaper than arrays and available for all wavelength ranges. The setup can be small and light, the grating withstands shocks and vibration much better than a classical spectrometer. The grating moves with a frequency of 500 Hz respectively 1000 Hz, a whole spectrum is acquired within milliseconds. The resolution is given by the grating line density and the spectrometer dimensions, as it is valid for every single detector spectrometer. Depending on the number of systems built, a price of the system can be expected significantly below those of low cost systems with fixed grating, neither wavelength range nor resolution are limited by the system setup.

: http://publica.fraunhofer.de/dokumente/N-17717.html