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Vorrichtung zum Refelektieren beschleunigter Elektronen

Device by means of which accelerated electrons discharged by an electron source are reflected onto a surface area of an object, comprises a dielectric main body, on which an electrically conductive layer is applied in a surface area
 
: Röder, O.; Leffler, D.; Kleemann, C.; Kubusch, J.; Forberger, L.

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DE 102009051374 A: 20091030
DE 102009051374 A: 20091030
H01J0037
H01J0033
Deutsch
Patent, Elektronische Publikation
Fraunhofer FEP ()

Abstract
WO 2011050875 A1 UPAB: 20110519 NOVELTY - The device by means of which accelerated electrons discharged by an electron source are reflected onto a surface area of an object, comprises a dielectric main body (30), on which an electrically conductive layer (39) is applied in a surface area, where an electrically conductive contacting element extends from the electrically conductive layer through the dielectric main body, which consists of a ceramic or glass. The ceramic is aluminum oxide or zirconium oxide. The electrically conductive layer is formed as gold layer with a thickness of 5 mu m. DETAILED DESCRIPTION - The device by means of which accelerated electrons discharged by an electron source are reflected onto a surface area of an object, comprises a dielectric main body (30), on which an electrically conductive layer (39) is applied in a surface area, where an electrically conductive contacting element extends from the electrically conductive layer through the dielectric main body, which consists of a ceramic or glass. The ceramic is aluminum oxide or zirconium oxide. The electrically conductive layer is formed as gold layer with a thickness of 5 mu m. The electrically conductive layer is divided into surface areas, which are formed electrically insulated from each other, on the surface of the dielectric main body, where each surface area is associated to a contacting element (31), which extends itself from layer are of the electrically conductive layer through the dielectric main body. The electrically conductive layer consists of two sub-layers deposited on top of each other. The sub-layer is formed as a bonding layer (33) or as a barrier layer (34, 35). The contacting element is formed as contact pin and the joint is formed between the dielectric main body and the contact pin in gas-tight manner. USE - Device useful for reflecting accelerated electrons discharged by an electron source onto a surface area of an object. ADVANTAGE - The device ensures efficient and economical reflecting of accelerated electrons on the object.

: http://publica.fraunhofer.de/dokumente/N-174816.html