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Large-area fabrication of stochastic nano-structures on polymer webs by ion- and plasma treatment

: Schönberger, W.; Gerlach, G.; Fahland, M.; Munzert, P.; Schulz, U.; Thielsch, R.; Kleinhempel, R.


Surface and coatings technology 205 (2011), Supplement 2, S.S495-S497
ISSN: 0257-8972
International Conference on Plasma Surface Engineering (PSE) <12, 2010, Garmisch-Partenkirchen>
Zeitschriftenaufsatz, Konferenzbeitrag
Fraunhofer IOF ()
Fraunhofer FEP ()
nanostructure; roll-to-roll; polymer; antireflection

Self-organized nano-structures can be created on polymer surfaces by applying a plasma or ion treatment [1]. This technology may be used for anti-reflection (AR) applications in plastic optical devices, e.g. for aspheric lenses in mobile phone cameras. Compared to conventional AR-coatings, the nano-structures exhibit a large potential for reduction of cost and increase of optical performance. The technology described in [1] was developed in a batchcoater and successful used to achieve AR-properties to polymer sheets and optical devices. This paper describes the transfer of this technology from a batch coater to an in-linemachine for continuous surface treatment. A suited ion source to being installed in reel-to-reel equipment is chosen. The best properties for the described approach were observed by polymer surface treatment by a glow discharge created with a dual magnetron systemwith fully poisoned (oxidized) target surface. The processwas installed and optimized in a pilotscale reel-to-reel coatingmachine with a process width of 600 mm. Stochastic nano-structureswere created on PET, TAC and ETFE substrates. The relevant process parameters for plasma treatment are discussed. The process was transferred to industrial equipment with 2100 mm process width.