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Silicon nitride, silicon dioxide, and emerging dielectrics 11

Full length papers of the International Symposium on Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics to be held May 1 - 6, 2011 in Montreal, Canada, as part of the 219th meeting of the Electrochemical Society (ECS)
 
: Sah, R.E.
: Electrochemical Society -ECS-, Dielectric Science and Technology Division

Pennington, NJ: ECS, 2011, XII, 934 S.
ECS transactions, 35, 4
International Symposium on Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics <11, 2011, Montreal>
Electrochemical Society (Meeting) <219, 2011, Montreal>
ISBN: 978-1-56677-865-7
ISBN: 978-1-60768-215-8
ISSN: 1938-5862
Englisch
Tagungsband
Fraunhofer IAF ()

: http://publica.fraunhofer.de/dokumente/N-174623.html