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Qualification of Materials, Components and Systems - Qualification of Fluidhandling Objects

Qualifizierung von Materialien, Komponenten und Systemen - Qualifizierung von Objekten zur Anwendung von Fluiden
 
: Ernst, C.; Werner, D.

Dorner, J. ; Fraunhofer-Institut für Produktionstechnik und Automatisierung -IPA-, Stuttgart; Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.:
Quo Vadis Media : 1st Technical Conference Ultra-Pure Media, November 2-3, 1999, Dresden, Germany. Joint Media - An European Initiative in the Field of Ultra-Pure Media for the Manufacture of Semiconductors
Stuttgart, 1999
S.109-117
Technical Conference Ultra-Pure Media <1, 1999, Dresden>
Englisch
Konferenzbeitrag
Fraunhofer IPA ()
High Purity Media; Reinheitsspezifikation; Reinheitsklasse; Versorgungslogistik; Media Supply System; Spurenverunreinigung; SEMI; SEMATECH; Chemikalie; Richtlinie; standard; gas; Teilchen

Abstract
IC-Manufacturing requires high quality fluids with lowest levels of particles and trace impurities. Suppliers of fluidhandling components and systems are obliged to prove the evidence of the products' suitability. The definition and usage of classification models is not practicable. Standardized specifications as a reference and in some cases even the test guidelines are missing.

: http://publica.fraunhofer.de/dokumente/N-173.html