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Numerical approach to extraction of elasto-plastic material models and corresponding properties of thin layers through nanoindentation technique
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2009
Conference Paper
Titel
Numerical approach to extraction of elasto-plastic material models and corresponding properties of thin layers through nanoindentation technique
Author(s)
Wymyslowski, A.
Wittler, O.
Mrossko, R.
Dudek, R.
Auersperg, J.
Dowhan, L.
Hauptwerk
10th International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2009
Konferenz
International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) 2009
DOI
10.1109/ESIME.2009.4938422
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM