Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Robust and Hermetic Borosilicate Glass Coatings by E-Beam Evaporation

: Hansen, U.; Maus, S.; Leib, J.; Töpper, M.

Volltext ()

Procedia chemistry. Online journal 1 (2009), Nr.1, S.76-79
ISSN: 1876-6196
Eurosensors <23, 2009, Lausanne>
Zeitschriftenaufsatz, Konferenzbeitrag, Elektronische Publikation
Fraunhofer IZM ()

The use of a plasma-assisted e-beam evaporation process enables a cost-efficient exploitation of the outstanding material properties of borosilicate glass - a chemically very inert material with minimal moisture absorption, excellent optical properties and excellent time and temperature stability. This paper gives further insight on the deposition and structuring of borosilicate glass films and the achievable film properties as well as feasible applications.